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Foundations of MEMS 2nd Edition by Chang Liu PDF Free Download

Foundation of MEMS by Chang Liu: A Comprehensive Review

If you are interested in learning about micro-electro-mechanical systems (MEMS), you may have come across the book Foundations of MEMS by Chang Liu. This book is one of the most popular and widely used textbooks on the subject, written by a renowned expert and professor in the field. But what is MEMS, who is Chang Liu, and what does his book offer? In this article, we will answer these questions and more, as well as show you how to access the book for free online.

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What is MEMS and why is it important?

MEMS stands for micro-electro-mechanical systems, which are devices that combine electrical and mechanical components at a microscopic scale. MEMS can range from a few micrometers to a few millimeters in size, and can perform various functions such as sensing, actuating, processing, or communicating. Some examples of MEMS devices are accelerometers, gyroscopes, microphones, pressure sensors, inkjet nozzles, microfluidic chips, optical switches, and micro-mirrors.

MEMS have many applications and benefits in various fields such as aerospace, automotive, biomedical, consumer electronics, environmental monitoring, industrial automation, telecommunications, and more. MEMS can enable new functionalities, improve performance, reduce size and weight, increase reliability and durability, lower power consumption and cost, and enhance integration and compatibility with other systems. MEMS are considered as one of the key enabling technologies for the development of smart devices, internet of things (IoT), nanotechnology, and artificial intelligence.

Who is Chang Liu and what is his contribution to MEMS?

Chang Liu is a professor of engineering at Northwestern University (Evanston, Illinois), where he established the MedX Laboratory to conduct advanced engineering research for medicine and health care. He received his M.S. and Ph.D. degrees from the California Institute of Technology in 1991 and 1995, respectively. His Ph.D. thesis was titled Micromachined sensors and actuators for fluid mechanics applications.

Liu has 20 years of research experience in the MEMS area and has published 200 technical papers in journals and refereed conference proceedings. He teaches undergraduate and graduate courses covering broad-ranging topics such as MEMS, solid-state electronics, electromechanics, sensor technology, circuits, dynamics, and heat transfer. He won a campus "Incomplete list of teachers ranked as excellent" honor in 2001 for developing and teaching the MEMS class, a precursor to his book.

Liu received the National Science Foundation's CAREER award in 1998 for his research proposal of developing artificial haircells using MEMS technology. He is currently a Subject Editor of the IEEE/ASME Journal of MEMS, and was an Associate Editor of the IEEE Sensors Journal. His work has been cited in popular media. Liu is a cofounder of Integrated Micro Devices (IMD) Corporation and a member of the scientific advisory board of NanoInk Corporation (Chicago, IL).

What is the book Foundations of MEMS and what does it cover?

Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology - all in a time-efficient and methodical manner. A wealth of examples and problems solidify students' understanding of abstract concepts and provide ample opportunities for practicing critical thinking.

The book covers the following topics:

  • Introduction to MEMS

  • Mechanics for MEMS design

  • Electrostatics for MEMS design

  • Piezoresistivity and piezoelectricity

  • Thermal effects in MEMS

  • Microfluidics

  • Optical MEMS

  • MEMS materials and microfabrication techniques

  • Packaging, reliability, and testing of MEMS

The book has 10 chapters, each with an introduction, a summary, a list of key terms, a set of review questions, and a set of homework problems. The book also has appendices that provide useful information such as physical constants, material properties, mathematical formulas, and circuit symbols. The book is accompanied by a website that contains additional resources such as lecture slides, solutions manual, sample exams, and links to relevant websites.

The book has the following features and highlights:

  • It is written in a clear and concise style that is easy to follow and understand.

  • It provides a balanced treatment of both electrical and mechanical aspects of MEMS.

  • It emphasizes the fundamental principles and concepts rather than the details and specifics of various devices.

  • It includes numerous examples and illustrations that demonstrate the practical applications and design considerations of MEMS.

  • It incorporates the latest developments and trends in the field such as nanoscale MEMS, bioMEMS, flexible MEMS, and energy harvesting MEMS.

  • It offers a comprehensive and up-to-date reference for students, instructors, researchers, and professionals who are interested in MEMS.

How can you access the book for free online?

If you want to read the book Foundations of MEMS by Chang Liu for free online, you may face some legal and ethical issues. The book is protected by copyright laws and intellectual property rights, which means that you cannot download or distribute it without the permission of the author or the publisher. Doing so may violate the law and cause legal consequences. Moreover, downloading or sharing pirated books may harm the author's reputation and income, as well as discourage them from producing more quality work in the future.

However, there may be some sources and methods that can help you find free PDF versions of the book online. These include:

  • Searching on Google or other search engines using keywords such as "foundation of mems chang liu free pdf" or "foundation of mems chang liu pdf download". You may find some websites that offer free downloads or online reading of the book. However, you should be careful about the quality, accuracy, and legality of these websites. Some of them may contain viruses, malware, or spam that can harm your computer or device. Some of them may also require you to register, pay, or complete surveys before accessing the book. You should always check the reviews, ratings, and feedbacks of these websites before using them.

  • Using online libraries or databases that provide access to academic books and journals. Some examples are Google Books, Google Scholar, Library Genesis, Sci-Hub, ResearchGate,, etc. These platforms may allow you to preview or download some parts or chapters of the book for free. However, you may not be able to access the full version of the book due to copyright restrictions or limited availability. You should also respect the terms and conditions of these platforms before using them.

  • Borrowing or requesting the book from your local library or university library. Many libraries have physical copies or electronic copies of the book that you can borrow or request for free or for a small fee. You may need to have a library card or a student ID to use this service. You should also follow the rules and regulations of the library regarding borrowing time, renewals, returns, fines, etc.

If none of these options work for you, you may consider some alternatives and recommendations for accessing the book. These include:

  • Table 2: Article with HTML formatting (continued) Purchasing or renting the book from online or offline bookstores or retailers. You can find various options and prices for buying or renting the book from websites such as Amazon, eBay, Chegg, Barnes & Noble, etc. You can also visit your local bookstore or retailer and see if they have the book in stock or can order it for you. Buying or renting the book may be more expensive than downloading it for free, but it may also be more reliable, convenient, and legal.

  • Asking or borrowing the book from your friends, classmates, colleagues, or instructors who have the book. You may know someone who has a copy of the book and is willing to lend it to you for free or for a favor. You can also ask your instructor if they have a spare copy of the book that you can use for your study or research. Asking or borrowing the book from others may be a good way to save money and time, but you should also respect their generosity and return the book in good condition and on time.

  • Using other books or resources that cover similar topics or concepts as the book. You may not be able to find the exact book you are looking for, but you may find other books or resources that can help you learn about MEMS and related fields. You can search for other books or resources on Google, online libraries, databases, websites, etc. You can also ask your instructor or librarian for recommendations or suggestions. Using other books or resources may not be as comprehensive or specific as the book, but they may still provide useful information and insights.

These are some of the ways that you can access the book Foundations of MEMS by Chang Liu for free online or by other means. We hope that this article has helped you understand what MEMS is, who Chang Liu is, and what his book offers. We also hope that you have learned how to find and use the book legally and ethically. If you are interested in learning more about MEMS and related fields, we encourage you to read the book and explore other sources of knowledge and inspiration.


In conclusion, Foundations of MEMS by Chang Liu is a comprehensive and authoritative textbook on micro-electro-mechanical systems (MEMS), written by a renowned expert and professor in the field. The book covers the fundamentals and applications of MEMS design, materials, fabrication, and testing, with numerous examples and problems. The book is suitable for students, instructors, researchers, and professionals who want to learn about MEMS in a systematic and methodical manner. The book can be accessed for free online through various sources and methods, but there may be legal and ethical issues involved. Alternatively, the book can be purchased or rented from online or offline bookstores or retailers, borrowed from libraries or friends, or substituted with other books or resources that cover similar topics.


  • What is the difference between MEMS and NEMS?

MEMS stands for micro-electro-mechanical systems, while NEMS stands for nano-electro-mechanical systems. The main difference between them is their size scale. MEMS devices are typically in the range of micrometers to millimeters, while NEMS devices are typically in the range of nanometers to micrometers. NEMS devices are smaller and more sensitive than MEMS devices, but they also face more challenges in fabrication, characterization, and integration.

  • What are some of the advantages and disadvantages of MEMS?

Some of the advantages of MEMS are:

  • They can enable new functionalities and improve performance of existing systems.

  • They can reduce size and weight of systems and components.

  • They can increase reliability and durability of systems and components.

  • They can lower power consumption and cost of systems and components.

  • They can enhance integration and compatibility with other systems and components.

Some of the disadvantages of MEMS are:

  • They may require complex design and fabrication processes.

  • They may suffer from fabrication defects and variations.

  • They may experience environmental effects such as temperature, humidity, pressure, etc.

  • They may face scaling issues such as surface forces, friction, stiction, etc.

  • They may have limited performance range and accuracy compared to macro-scale devices.

  • What are some of the current and future trends in MEMS?

Some of the current and future trends in MEMS are:

  • Nanoscale MEMS, which involve the fabrication and manipulation of devices at the nanometer scale.

  • BioMEMS, which involve the integration of biological materials and systems with MEMS devices.

  • Flexible MEMS, which involve the use of flexible substrates and materials for MEMS devices.

  • Energy harvesting MEMS, which involve the conversion of ambient energy sources such as light, heat, vibration, etc. into electrical energy for MEMS devices.

  • Smart MEMS, which involve the incorporation of intelligence and autonomy into MEMS devices.

  • Who are some of the other prominent authors and researchers in the field of MEMS?

Some of the other prominent authors and researchers in the field of MEMS are:

  • Stephen D. Senturia, who wrote the book Microsystem Design and is a professor emeritus at MIT.

  • Nadim Maluf and Kirt Williams, who wrote the book An Introduction to Microelectromechanical Systems Engineering and are founders of Qorvo Inc.

  • Tai-Ran Hsu, who wrote the book MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering and is a professor at San Jose State University.

  • Gianluca Piazza, who wrote the book Piezoelectric MEMS Resonators and is a professor at Carnegie Mellon University.

  • Mehran Mehregany, who wrote the book Silicon Carbide Microelectromechanical Systems for Harsh Environments and is a professor at Case Western Reserve University.

  • How can I learn more about MEMS and related fields?

There are many ways that you can learn more about MEMS and related fields, such as:

  • Reading books, journals, magazines, websites, blogs, etc. that cover MEMS and related topics.

  • Taking courses, workshops, seminars, webinars, etc. that teach MEMS and related topics.

  • Joining clubs, societies, associations, networks, etc. that focus on MEMS and related topics.

  • Attending conferences, symposiums, exhibitions, fairs, etc. that showcase MEMS and related topics.

  • Participating in projects, competitions, challenges, hackathons, etc. that involve MEMS and related topics.



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